Specific Process Knowledge/Lithography: Difference between revisions

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 The course is recommended for all users that intend to perform any lithographic processing in the cleanroom.
-'''Schedule:'''
-The tool package consists of a lecture and a one-day training session in the cleanroom.
-*Lecture once a month (~3.5 hours). '''NEXT LECTURE: Wednesday 13th of April 9:15 (B347 Seminar Room)'''
-*Training session once a week, max. 6 persons per session (9:00 - 16:00) '''FIRST SESSION: Wednesday 30th of March 9:00'''
-'''Location:'''
+{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 80%;"
+|-
+|-
+|-style="background:White; color:black; text-align:center"
+!colspan="2"|Tool Package Training Lithography
+|-
-Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip
+|-
+!Schedule
+|
+*Lecture once a month (~3.5 hours) '''NEXT LECTURE: Wednesday 13th of April 9:15 (B347 Seminar Room)'''
+*Training session once a week, max. 6 persons per session (9:00 - 16:00) '''FIRST SESSION: Wednesday 30th of March 9:00'''
+|-
-'''Qualified Prerequisites:'''
+|-
+|-style="background:White; color:black; text-align:center"
+!Location
+|Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip
+|-
+|-
+|-style="background:White; color:black; text-align:center"
+!Qualified Prerequisites
+|
 * Cleanroom safety course at DTU Danchip
 * Wet Chemistry Course at DTU Danchip
-'''Preparations:'''
+|-
+|-
+|-style="background:White; color:black; text-align:center"
+!Preparations
+|
 Before the lecture
 * Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below)
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 * Study the equipment manuals. The manuals are available in LabManager.
 * Study the TPT process flows (first print and alignment). The process flows can be found below.
+|-
+|}
 ''' Course Responsible:'''