Specific Process Knowledge/Lithography: Difference between revisions
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* Watch the training videos of spin coating (automatic), exposure (operation and alignment), and development (automatic). The training videos can be found below. | * Watch the training videos of spin coating (automatic), exposure (operation and alignment), and development (automatic). The training videos can be found below. | ||
* Study the equipment manuals. The manuals are available in LabManager. | * Study the equipment manuals. The manuals are available in LabManager. | ||
* Study the TPT process flows. The process flows can be found below. | |||
''' Course Responsible:''' | ''' Course Responsible:''' | ||