Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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= Getting started = | = Getting started = | ||
[[File:UVLPic1.png|400px|right]] | |||
[[File:UVLPic2.png|160px|right]] | |||
'''Before you plan your UV processing and request for training on any equipment in UV lithography, please go through the following steps.''' | '''Before you plan your UV processing and request for training on any equipment in UV lithography, please go through the following steps.''' | ||
If you are new to photolithography, you can visit [https://en.wikipedia.org/wiki/Photolithography this] wikipedia webpage about photolithography before you start. | If you are new to photolithography, you can visit [https://en.wikipedia.org/wiki/Photolithography this] wikipedia webpage about photolithography before you start. | ||
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* '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates [[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|in this table]]. | * '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates [[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|in this table]]. | ||