Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
| Line 15: | Line 15: | ||
<br><br><br> | <br><br><br> | ||
[[File:UVLPic2.png| | [[File:UVLPic2.png|160px|right]] | ||
* '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates [[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|in this table]]. | * '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates [[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|in this table]]. | ||