Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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=UV Lithography Equipment= | =UV Lithography Equipment= | ||
{| style="color: black;" width=" | {| style="color: black;" width="70%" | ||
| colspan="2" | | | colspan="2" | | ||
|- | |- | ||
| style="width: 50%"| | | style="width: 50%"| | ||
===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]=== | ===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]=== | ||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | *[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | ||
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*[[Specific Process Knowledge/Lithography/UVExposure#Inclined UV Lamp|Inclined UV Lamp]] | *[[Specific Process Knowledge/Lithography/UVExposure#Inclined UV Lamp|Inclined UV Lamp]] | ||
| style="width: 50%"| | | style="width: 50%"| | ||
===[[Specific Process Knowledge/Lithography/Baking|Baking]]=== | ===[[Specific Process Knowledge/Lithography/Baking|Baking]]=== | ||