Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
| Line 30: | Line 30: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''AZ5214E''' | |'''AZ5214E''' | ||
|Positive | |Positive but can be reverse | ||
|AZ Electronic Materials | |AZ Electronic Materials | ||
|Can be used for both positive and reverse processes with resist thickness between 1 to 4um. | |Can be used for both positive and reverse processes with resist thickness between 1 to 4um. | ||