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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/Technology_Research/Fabrication_of_Hyperbolic_Metamaterials_using_Atomic_Layer_Deposition click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Technology_Research/Fabrication_of_Hyperbolic_Metamaterials_using_Atomic_Layer_Deposition click here]'''
 
<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br>
All images and photos on this page belongs to <b>DTU Nanolab</b> and <b>DTU Electro</b> (previous DTU Fotonik).<br>
The fabrication and characterization described below were conducted in <b>2013-2016 by Evgeniy Shkondin, DTU Nanolab</b>.<br></i>
 


=Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition=
=Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition=


*'''Project type:''' Ph.d project
*'''Project type:''' Ph.d project
*'''Project responsible:''' Evgeniy Shkodin
*'''Project responsible: Evgeniy Shkondin <br>  [[image:orcid_16x16.png|16x16px]]https://orcid.org/0000-0002-8347-1814'''
*'''Supervisors:''' Andrei Lavrinenko, Flemming Jensen
*'''Supervisors:''' Andrei Lavrinenko, Flemming Jensen
*'''Partners involved:''' DTU Fotonik, DTU Danchip
*'''Partners involved:''' DTU Fotonik, DTU Nanolab (former DTU Danchip)
*'''Full Thesis:''' https://orbit.dtu.dk/en/publications/fabrication-of-hyperbolic-metamaterials-using-atomic-layer-deposi


==Project Description==
==Project Description==
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==Publications in peer-review journals==
==Publications in peer-review journals==
===Midinfrared Surface Waves on a High Aspect Ratio Nanotrench Platform ===
O. Takayama, <u>E. Shkondin</u>, A. Bogdanov, M. E. Aryaee Panah, K. Golenicki, P. Dmitriev, T. Repän, R. Malureanu, P. Belov, F. Jensen & A. Lavrinenko. ACS Photonics, 2017, 4 (11), pp 2899–2907 [http://pubs.acs.org/doi/abs/10.1021/acsphotonics.7b00924 LINK]
*[[/AZO_gratings|<strong>Procces flow</strong>]]


===Large-Scale High Aspect Ratio Al-Doped ZnO Nanopillars Arrays as Anisotropic Metamaterials===
===Large-Scale High Aspect Ratio Al-Doped ZnO Nanopillars Arrays as Anisotropic Metamaterials===
<u>E. Shkondin</u>, O. Takayama, M. E. Aryaee Panah, P. Liu, P. V. Larsen, M. D. Mar, F. Jensen. & A. Lavrinenko
<u>E. Shkondin</u>, O. Takayama, M. E. Aryaee Panah, P. Liu, P. V. Larsen, M. D. Mar, F. Jensen. & A. Lavrinenko
(2017). Submitted
(2017). Optical Materials Express, 7(5), pp. 1606-1627 (2017)  [https://www.osapublishing.org/ome/abstract.cfm?uri=ome-7-5-1606 LINK]
 
* Link to process flow (coming soon)
 
===A Reconfigurable Platform for Mid-Infrared Surface Photonics Based on a High Aspect Ratio Aluminum-Doped Zinc Oxide Multi-Trench Structure===
O. Takayama, <u>E. Shkondin</u>, A. Bogdanov, M. E. Aryaee Panah, K. Golenicki, P. Dmitriev, T. Repän, R. Malureanu, P. Belov, F. Jensen & A. Lavrinenko
(2017). Submitted


* Link to process flow (coming soon)
*[[/AZO_pillars|<strong>Procces flow</strong>]]


===Laguerre-Gauss Beam Generation in IR and UV by Subwavelength Surface-Relief Gratings===
===Laguerre-Gauss Beam Generation in IR and UV by Subwavelength Surface-Relief Gratings===
L. Vertchenko, <u>E. Shkondin</u>, R. Malureanu, & C. Monken
L. Vertchenko, <u>E. Shkondin</u>, R. Malureanu, & C. Monken
(2017). Laguerre-Gauss beam generation in IR and UV by subwavelength surface-relief gratings. Optics Express, 25(6), pp. 5917-5926 (2017)  [https://osapublishing.org/oe/abstract.cfm?uri=oe-25-6-5917 LINK]
(2017). Optics Express, 25(6), pp. 5917-5926 (2017)  [https://osapublishing.org/oe/abstract.cfm?uri=oe-25-6-5917 LINK]


*[[/TiO2_Q_plates|Procces flow]]
*[[/TiO2_Q_plates|<strong>Procces flow</strong>]]


===Fabrication of High Aspect Ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Nanogratings by Atomic Layer Deposition===
===Fabrication of High Aspect Ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Nanogratings by Atomic Layer Deposition===
<u>E. Shkondin</u>, O. Takayama, J. Lindhard, P. V. Larsen, M. D. Mar, F. Jensen & A. Lavrinenko
<u>E. Shkondin</u>, O. Takayama, J. Lindhard, P. V. Larsen, M. D. Mar, F. Jensen & A. Lavrinenko
(2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016)  [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK]
(2016). Journal of Vacuum Science and Technology A, 34, 031605 (2016)  [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK]


*[[/TIO_ALU_Gratings_Procces_flow|Procces flow]]
*[[/TIO_ALU_Gratings_Procces_flow|<strong>Procces flow</strong>]]


===Experimental Demonstration of Effective Medium Approximation Breakdown in Deeply Subwavelength All-Dielectric Multilayers===
===Experimental Demonstration of Effective Medium Approximation Breakdown in Deeply Subwavelength All-Dielectric Multilayers===
S. Zhukovsky, A. Andryieuski, O. Takayama, <u>E. Shkondin</u>, R. Malureanu, F. Jensen, & A. Lavrinenko
S. Zhukovsky, A. Andryieuski, O. Takayama, <u>E. Shkondin</u>, R. Malureanu, F. Jensen, & A. Lavrinenko
(2015). Experimental Demonstration of Effective Medium Approximation Breakdown in Deeply Subwavelength
(2015). Physical Review Letters, 115(17), 177402  [http://journals.aps.org/prl/abstract/10.1103/PhysRevLett.115.177402 LINK]
All-Dielectric Multilayers. Physical Review Letters, 115(17), 177402  [http://journals.aps.org/prl/abstract/10.1103/PhysRevLett.115.177402 LINK]
 
*[[/EMT_Procces_flow|<strong>Procces flow</strong>]]
 
 


*[[/EMT_Procces_flow|Procces flow]]
<br>


==Publications in proceedings==
==Publications in proceedings==
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<u>E. Shkondin</u>, L. Leandro, R. Malureanu, F. Jensen, N. Rozlosnik, A. V. Lavrinenko <br>
<u>E. Shkondin</u>, L. Leandro, R. Malureanu, F. Jensen, N. Rozlosnik, A. V. Lavrinenko <br>
Proceedings of ICTON, IEEE, 7193380. (2015)
Proceedings of ICTON, IEEE, 7193380. (2015)


==Conferences and workshops==
==Conferences and workshops==
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===Conductive oxides trench structures as hyperbolic metamaterials in mid-infrared range===
===Conductive oxides trench structures as hyperbolic metamaterials in mid-infrared range===
O. Takayama, <u>E. Shkondin</u>, M. E. A. Panah, T. Reän, R. Malureanu, F. Jensen, A. V. Lavrinenko  <br>
O. Takayama, <u>E. Shkondin</u>, M. E. A. Panah, T. Reän, R. Malureanu, F. Jensen, A. V. Lavrinenko  <br>
Abstract from 14th International Conference of Near-Field Optics, Nanophotonics and Related Techniques, Hamamatsu, Japan
2016. Abstract from 14th International Conference of Near-Field Optics, Nanophotonics and Related Techniques, Hamamatsu, Japan


===Fabrication of hollow coaxial ZnAl2O4 high aspect ratio freestanding nanopillars based on the Kirkendall effect===
===Fabrication of hollow coaxial ZnAl<sub>2</sub>O<sub>4</sub> high aspect ratio freestanding nanopillars based on the Kirkendall effect===
<u>E. Shkondin</u>, F. Jensen, A. V. Lavrinenko <br>
<u>E. Shkondin</u>, F. Jensen, A. V. Lavrinenko <br>
2016. Abstract from 42nd Micro and Nano Engineering 2016, Vienna, Austria
2016. Abstract from 42nd Micro and Nano Engineering 2016, Vienna, Austria
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2016. Abstract from 16th Atomic Layer Deposition Conference, Dublin, Ireland.
2016. Abstract from 16th Atomic Layer Deposition Conference, Dublin, Ireland.


===TiO2 and Al2O3 ALD grown multilayers for subwavelength photonics===
===TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> ALD grown multilayers for subwavelength photonics===
<u>E. Shkondin</u>, F. Jensen, A. V. Lavrinenko, M. D. Mar, P. V. Larsen, R. Malureanu, S. Zhukovsky, A. Andryieuski, O. Takayama <br<
<u>E. Shkondin</u>, F. Jensen, A. V. Lavrinenko, M. D. Mar, P. V. Larsen, R. Malureanu, S. Zhukovsky, A. Andryieuski, O. Takayama <br>
DTU's Sustain Conference 2015, Technical University of Denmark, Kgs. Lyngby, Denmark (2015)
2015. DTU's Sustain Conference 2015, Technical University of Denmark, Kgs. Lyngby, Denmark (2015)


===Deep subwavelength photonic multilayers fabricated by atomic layer deposition===
===Deep subwavelength photonic multilayers fabricated by atomic layer deposition===
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2015. Paper presented at 41st International conference on Micro and Nano Engineering, The Hague, Netherlands.
2015. Paper presented at 41st International conference on Micro and Nano Engineering, The Hague, Netherlands.


===Fabrication of TiO2 and Al2O3 High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale===
===Fabrication of TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale===
<u>E. Shkondin</u>, J. M. Lindhard, M. D. Mar, F. Jensen, A. V. Lavrinenko <br>
<u>E. Shkondin</u>, J. M. Lindhard, M. D. Mar, F. Jensen, A. V. Lavrinenko <br>
2015. Paper presented at 15th International Conference on Atomic Layer Deposition, Portland, Oregon, United States
2015. Paper presented at 15th International Conference on Atomic Layer Deposition, Portland, Oregon, United States
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===Depositing Materials on the Micro- and Nanoscale===
===Depositing Materials on the Micro- and Nanoscale===
M. D. Mar, B. Herstrøm, <u>E. Shkondin</u>, P. Pholprasit, F. Jensen <br>
M. D. Mar, B. Herstrøm, <u>E. Shkondin</u>, P. Pholprasit, F. Jensen <br>
DTU's Sustain Conference 2014, Technical University of Denmark, Kgs. Lyngby, Denmark (2014)
2014. DTU's Sustain Conference 2014, Technical University of Denmark, Kgs. Lyngby, Denmark (2014)




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