Specific Process Knowledge/Lithography
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Lithography
Lithography is a method used for transferring a pattern from a physical or digital mask onto the substrate. At DTU Nanolab we have four different types of lithography available:
- UV Lithography: UV lithography is used for making features as small as about 1 micrometer
- DUV Stepper Lithography: DUV lithography is used for features as small as 200 nm
- E-beam Lithography: The smallest features can be made in our e-beam writers - about 10 nm
- Nano Imprint Lithography: for stamping without irradiation
Comparing lithography methods at DTU Nanolab
| UV Lithography | DUV Stepper Lithography | E-beam Lithography | Nano Imprint Lithography | |
|---|---|---|---|---|
| Generel description | Pattern transfer via ultraviolet (UV) light | Pattern transfer via deep ultraviolet (DUV) light | Patterning by electron beam | Pattern transfer via hot embossing (HE) |
| Pattern size range | ~1 µm and up (resist type, thickness, and pattern dependent) |
~200 nm and up (pattern type, shape and pitch dependent) |
~10-1000 nm (and larger at high currents) |
~20 nm and up |
| Resist type |
UV sensitive:
|
DUV sensitive:
|
E-beam sensitive:
|
Imprint polymers:
|
| Resist thickness range | ~0.5 µm to 200 µm | ~50 nm to 2 µm | ~30 nm to 1 µm | ~100 nm to 2 µm |
| Typical exposure time | Mask aligner: 10-180 s per wafer Maskless aligner: 5-60 minutes per wafer |
Process dependent:
Throughput is up to 60 wafers/hour |
Process dependent:
Process time [s]: |
Process dependent, including heating/cooling rates |
| Substrate size |
|
|
We have cassettes fitting:
Only one cassette can be loaded at a time |
|
| Allowed materials | Any standard cleanroom material | Any standard cleanroom material |
Any standard cleanroom material, except:
|
Any standard cleanroom material |
Equipment and Process Pages
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Lithography Tool Package Training
DTU Nanolab offers a Tool Package Training for Lithography (TPT Lithography). You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on lithographic processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can do the online training that explains the operation for the specific lithography equipment you want to use in more detail. After completing the online training, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.
Course Layout
- Online lecture videos (theory)
- Quizzes for each section
- Online training videos (equipment operation)
- Individual hands-on training
Individual hands-on training can be requested via training@nanolab.dtu.dk.
Learning objectives
- Coating
- Exposure
- Development
- Resist, substrates and pre-treatment
- Post-lithography steps
Qualifying Prerequisites
- Cleanroom safety course at DTU Nanolab
- Admission to the cleanroom must be obtained before the group training session
Course Responsible
- Jens Hindborg Hemmingsen
- Thomas Aarøe Anhøj
If you have questions you can contact us via lithography@nanolab.dtu.dk.
Knowledge and Information about Lithography