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- 15:26, 10 November 2025 Pevo talk contribs created page File:Phosphorous doped polySi.jpg (Phosphorous_doped_polySi)
- 15:26, 10 November 2025 Pevo talk contribs uploaded File:Phosphorous doped polySi.jpg (Phosphorous_doped_polySi)
- 10:53, 7 November 2025 Pevo talk contribs created page Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon/Phosphorous doped poly-Si (Created page with "THIS PAGE IS UNDER CONSTRUCTION {{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Furnace_LPCVD_PolySilicon/Boron_doped_poly-Si_and_a-Si click here]''' ==Boron-doped amorphous silicon by using 4" LPCVD polysilicon furnace (B4) == ''Result from Thomas Pedersen, DTU Nanotech (now DTU Nanolab), September 2015'' ===...")
- 10:08, 26 September 2025 Pevo talk contribs created page File:2025-09-25 15-14-58 Wafer 18 08 2025 LPCVD Nirtide E3 159nm Rel.jpg
- 10:08, 26 September 2025 Pevo talk contribs uploaded File:2025-09-25 15-14-58 Wafer 18 08 2025 LPCVD Nirtide E3 159nm Rel.jpg
- 10:08, 26 September 2025 Pevo talk contribs created page File:2025-09-25 15-14-58 Wafer 18 08 2025 LPCVD Nirtide E3 159nm Abs.jpg
- 10:08, 26 September 2025 Pevo talk contribs uploaded File:2025-09-25 15-14-58 Wafer 18 08 2025 LPCVD Nirtide E3 159nm Abs.jpg
- 10:02, 26 September 2025 Pevo talk contribs created page File:2025-09-26 07-45-27 Wafer 18 08 2025 LPCVD Nitride B2 160nm Rel.jpg
- 10:02, 26 September 2025 Pevo talk contribs uploaded File:2025-09-26 07-45-27 Wafer 18 08 2025 LPCVD Nitride B2 160nm Rel.jpg
- 10:02, 26 September 2025 Pevo talk contribs created page File:2025-09-26 07-45-27 Wafer 18 08 2025 LPCVD Nitride B2 160nm Abs.jpg
- 10:02, 26 September 2025 Pevo talk contribs uploaded File:2025-09-26 07-45-27 Wafer 18 08 2025 LPCVD Nitride B2 160nm Abs.jpg
- 12:26, 18 September 2025 Pevo talk contribs created page File:2023-01-24 12-50-53 Wafer 6LPCVD Nitride 150nm Rel.jpg
- 12:26, 18 September 2025 Pevo talk contribs uploaded File:2023-01-24 12-50-53 Wafer 6LPCVD Nitride 150nm Rel.jpg
- 12:26, 18 September 2025 Pevo talk contribs created page File:2023-01-24 12-50-53 Wafer 6LPCVD Nitride 150nm Abs.jpg
- 12:26, 18 September 2025 Pevo talk contribs uploaded File:2023-01-24 12-50-53 Wafer 6LPCVD Nitride 150nm Abs.jpg
- 13:51, 17 September 2025 Pevo talk contribs created page File:2023-06-06 12-55-07 Wafer 9 4LPCVD Nitride 155nm Rel.jpg
- 13:51, 17 September 2025 Pevo talk contribs uploaded File:2023-06-06 12-55-07 Wafer 9 4LPCVD Nitride 155nm Rel.jpg
- 13:51, 17 September 2025 Pevo talk contribs created page File:2023-06-06 12-55-07 Wafer 9 4LPCVD Nitride 155nm Abs.jpg
- 13:51, 17 September 2025 Pevo talk contribs uploaded File:2023-06-06 12-55-07 Wafer 9 4LPCVD Nitride 155nm Abs.jpg
- 13:50, 17 September 2025 Pevo talk contribs created page File:2023-06-06 09-58-49 Wafer 8 4LPCVD Nitride 155nm Rel.jpg
- 13:50, 17 September 2025 Pevo talk contribs uploaded File:2023-06-06 09-58-49 Wafer 8 4LPCVD Nitride 155nm Rel.jpg
- 13:43, 17 September 2025 Pevo talk contribs created page File:2023-06-06 09-58-49 Wafer 8 4LPCVD Nitride 155nm Abs.jpg
- 13:43, 17 September 2025 Pevo talk contribs uploaded File:2023-06-06 09-58-49 Wafer 8 4LPCVD Nitride 155nm Abs.jpg
- 13:42, 17 September 2025 Pevo talk contribs created page File:2023-01-24 11-00-04 Wafer 4LPCVD Nitride 160nm Rel.jpg
- 13:42, 17 September 2025 Pevo talk contribs uploaded File:2023-01-24 11-00-04 Wafer 4LPCVD Nitride 160nm Rel.jpg
- 13:41, 17 September 2025 Pevo talk contribs created page File:2023-01-24 11-00-04 Wafer 4LPCVD Nitride 160nm Abs.jpg
- 13:41, 17 September 2025 Pevo talk contribs uploaded File:2023-01-24 11-00-04 Wafer 4LPCVD Nitride 160nm Abs.jpg
- 11:47, 16 September 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/C3 furnace break-down voltage measurement results (Created page with "==Breakdown voltage results for the C3 Anneal-Bond furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' <i>= Absolute break-down voltage/oxide thickness<i> |- |'''November 2023''' |DRY1100 |488 nm |350x350px|thumb|left |image:...")
- 11:46, 16 September 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/C1 furnace break-down voltage measurement results (Created page with "==Breakdown voltage results for the C1 Anneal-Oxide furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' <i>= Absolute break-down voltage/oxide thickness<i> |- |'''October 2023''' |DRY1100 |510 nm |350x350px|thumb|left...")
- 11:45, 16 September 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/E1 furnace break-down voltage measurement results (Created page with "==Breakdown voltage results for the E1 8" Oxidation furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''February 2022''' |DRY1050 |117 nm |350x350px|thumb|left |image:2022-02-08_10-47-35_Wafer_E1_117nm_Rel.png|350x350px|thumb|...")
- 11:42, 16 September 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A3 furnace break-down voltage measurement results (Created page with "==Breakdown voltage results for the A3 Phosphorus Drive-in furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''November 2021''' |DRY1050 |118 nm |350x350px|thumb|left |image:2021-11-09_08-27-49_Wafer_A3_DRY1050_118nm_R...")
- 10:52, 16 September 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A2 furnace break-down voltage measurement results (Created page with "==Breakdown voltage results for the A2 Gate Oxide furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''February 2022''' |DRY1050 |150 nm |350x350px|thumb|left |image:2022-02-08_10-56-57_Wafer_A2_150nm_Rel.png|350x350px|thumb|le...")
- 10:50, 16 September 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurementsn/A2 furnace break-down voltage measurement results (Created page with "==Breakdown voltage results for the A2 Gate Oxide furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''February 2022''' |DRY1050 |150 nm |350x350px|thumb|left |image:2022-02-08_10-56-57_Wafer_A2_150nm_Rel.png|350x350px|thumb|le...")
- 10:49, 16 September 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A1 furnace break-down voltage measurement results (Created page with "==Breakdown voltage results for the A1 Boron Drive-in and Pre-dep furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''November 2021''' |DRY1050 |100 nm |350x350px|thumb|left |image:2021-11-02_14-32-24_Wafer_3_A1_DRY1...")
- 08:55, 16 September 2025 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Oxidation/A1 furnace break-down voltage measurement results (Created page with "===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''November 2021''' |DRY1050 |100 nm |350x350px|thumb|left |350x350px|thumb|left |- |'''February 2022''' |DRY1050 |10...")
- 08:30, 16 September 2025 Pevo talk contribs created page File:2023-11-24 08-23-07 Wafer C3 DRY1100 488nm Rel.jpg
- 08:30, 16 September 2025 Pevo talk contribs uploaded File:2023-11-24 08-23-07 Wafer C3 DRY1100 488nm Rel.jpg
- 08:30, 16 September 2025 Pevo talk contribs created page File:2023-11-24 08-23-07 Wafer C3 DRY1100 488nm Abs.jpg
- 08:30, 16 September 2025 Pevo talk contribs uploaded File:2023-11-24 08-23-07 Wafer C3 DRY1100 488nm Abs.jpg
- 08:28, 16 September 2025 Pevo talk contribs created page File:2023-10-17 09-07-07 Wafer C1 DRY1100 510nm wRCA Rel edit.jpg
- 08:28, 16 September 2025 Pevo talk contribs uploaded File:2023-10-17 09-07-07 Wafer C1 DRY1100 510nm wRCA Rel edit.jpg
- 08:28, 16 September 2025 Pevo talk contribs created page File:2023-10-17 09-07-07 Wafer C1 DRY1100 510nm wRCA Abs edit.jpg
- 08:28, 16 September 2025 Pevo talk contribs uploaded File:2023-10-17 09-07-07 Wafer C1 DRY1100 510nm wRCA Abs edit.jpg
- 08:24, 16 September 2025 Pevo talk contribs created page File:2025-04-07 16-07-41 Wafer 17 02 2025 E1 Wafer DRY1050 115nm Rel.jpg
- 08:24, 16 September 2025 Pevo talk contribs uploaded File:2025-04-07 16-07-41 Wafer 17 02 2025 E1 Wafer DRY1050 115nm Rel.jpg
- 08:24, 16 September 2025 Pevo talk contribs created page File:2025-04-07 16-07-41 Wafer 17 02 2025 E1 Wafer DRY1050 115nm Abs.jpg
- 08:24, 16 September 2025 Pevo talk contribs uploaded File:2025-04-07 16-07-41 Wafer 17 02 2025 E1 Wafer DRY1050 115nm Abs.jpg
- 08:23, 16 September 2025 Pevo talk contribs created page File:2023-11-10 13-42-10 Wafer E1 DRY1100 510nm Rel.png
- 08:23, 16 September 2025 Pevo talk contribs uploaded File:2023-11-10 13-42-10 Wafer E1 DRY1100 510nm Rel.png
- 08:23, 16 September 2025 Pevo talk contribs created page File:2023-11-10 13-42-10 Wafer E1 DRY1100 510nm Abs.jpg
