All public logs

Combined display of all available logs of LabAdviser. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

13:54, 26 February 2024 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace/Pyrolysis with Resist Pyrlysis furnace (Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace click here]''' ''This page is written by DTU Nanolab internal'' ==Pyrolysis Recipes== Because the properties of the final carbon are largely depending on the pyrolysis process as well as the polymer precusors, each parameter has...")
13:49, 26 February 2024 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace/Acceptance test (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance_test click here]''' ''This page is written by DTU Nanolab internal'' ==Multipurpose Anneal furnace acceptance test== The acceptance for the Multipurpose Anneal furnace was performed in November 2014 by ATV Technologie and DTU Nanolab. At...")
13:24, 26 February 2024 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace (Created page with "==From February 2024: RESIST PYROLYSIS FURNACE== '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing#Multipurpose_annealing_furnace click here]''' ''This page is written by DTU Nanolab internal'' Thermal A2 Furnace A2 ==The...")
13:20, 26 February 2024 Pevo talk contribs created page Specific Process Knowledge/Thermal Process/Pyrolysis/Pyrolysis with Resist Pyrolysis Furnace (Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace click here]''' ''This page is written by DTU Nanolab internal'' ==Pyrolysis Recipes== Because the properties of the final carbon are largely depending on the pyrolysis process as well as the polymer precusors, each parameter has...")
12:06, 15 December 2023 Pevo talk contribs created page File:Oxidation test 2.jpg (C4 furnace - Oxidation test - 2)
12:06, 15 December 2023 Pevo talk contribs uploaded File:Oxidation test 2.jpg (C4 furnace - Oxidation test - 2)
12:05, 15 December 2023 Pevo talk contribs created page File:Oxidation test 1.jpg (C4 furnace - Oxidation test - 1)
12:05, 15 December 2023 Pevo talk contribs uploaded File:Oxidation test 1.jpg (C4 furnace - Oxidation test - 1)
15:05, 4 December 2023 Pevo talk contribs created page File:Thin nitride films below 30nm.pptx
15:05, 4 December 2023 Pevo talk contribs uploaded File:Thin nitride films below 30nm.pptx
11:44, 29 November 2023 Pevo talk contribs created page File:Stephan Presentation.pptx (Presentation of Mathias Adelmark's 3 week projekt: Deposition of thin nitride films)
11:44, 29 November 2023 Pevo talk contribs uploaded File:Stephan Presentation.pptx (Presentation of Mathias Adelmark's 3 week projekt: Deposition of thin nitride films)
11:02, 2 August 2023 Pevo talk contribs created page File:SEM Gemini 1.png (SEM Gemini 1)
11:02, 2 August 2023 Pevo talk contribs uploaded File:SEM Gemini 1.png (SEM Gemini 1)
10:54, 2 August 2023 Pevo talk contribs created page Specific Process Knowledge/Characterization/SEM Gemini 1 (Created page with " '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_1 click here]'''  ''This page is written by DTU Nanolab internal'' 400x400px|right|thumb|The SEM Supra 1 located in basement 346-907.{{photo1}} ")
13:04, 17 April 2023 Pevo talk contribs created page Specific Process Knowledge/Characterization/Particle Scanner Takano (Created page with "=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>550px=")
09:08, 30 January 2023 Pevo talk contribs created page File:Boron doped polySi.jpg
09:08, 30 January 2023 Pevo talk contribs uploaded File:Boron doped polySi.jpg
14:26, 26 January 2023 Pevo talk contribs created page Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon/Boron doped poly-Si (Created page with " ==Results from the acceptance test 2012== {| border="2" cellspacing="1" cellpadding="8" !Recipe name !Deposition rate [nm/min] !Refractive index@630nm !Thickness variation on center wafer !Thickness variation along the boat !Surface roughness [nm] !Sheet resistance [Ohms/square] !Boron concentation [boron atoms/cm<sup>3</sup>] !Comments |- |"DOPEPOLY" |~ 4.0-4.1 (4" wafers) | 1.29%-1.38% (4" wafers) | 1.63%-1.81% (4" wafers) | |~ 4.83, measured with AFM standard tip...")
08:30, 30 August 2022 Pevo talk contribs uploaded File:C1thickness-vs-slot.jpg
08:26, 30 August 2022 Pevo talk contribs uploaded File:C1thickness.jpg
13:08, 29 August 2022 Pevo talk contribs uploaded File:C1ThickVsSlot.pdf
14:11, 5 August 2022 Pevo talk contribs uploaded File:TEOS.jpg
12:29, 5 August 2022 Pevo talk contribs uploaded File:ASi-n-k.jpg
12:28, 5 August 2022 Pevo talk contribs uploaded a new version of File:ASi-ellipsometer.jpg
12:27, 5 August 2022 Pevo talk contribs uploaded File:ASi-ellipsometer.jpg
11:10, 5 August 2022 Pevo talk contribs uploaded File:ASi-SEM.jpg (Amorphous LPCVD on SiO2 measured by SEM)
15:01, 1 December 2021 Pevo talk contribs uploaded File:Breakdown.jpg
14:17, 1 December 2021 Pevo talk contribs uploaded File:2021-11-11 11-34-43 Wafer A1 WET1050 Abs.png
14:16, 1 December 2021 Pevo talk contribs uploaded File:2021-11-09 08-27-49 Wafer A3 DRY1050 118nm Rel.jpg
14:16, 1 December 2021 Pevo talk contribs uploaded File:2021-11-09 08-27-49 Wafer A3 DRY1050 118nm Abs.jpg
14:16, 1 December 2021 Pevo talk contribs uploaded File:2021-11-04 08-25-53 Wafer A3 WET1050 320nm Rel.png
14:15, 1 December 2021 Pevo talk contribs uploaded File:2021-11-04 08-25-53 Wafer A3 WET1050 320nm Abs.png
14:15, 1 December 2021 Pevo talk contribs uploaded File:2021-11-02 14-32-24 Wafer 3 A1 DRY1050 100nm Rel.png
14:15, 1 December 2021 Pevo talk contribs uploaded File:2021-11-11 11-34-43 Wafer A1 WET1050 Rel.png
14:10, 1 December 2021 Pevo talk contribs uploaded File:2021-11-02 14-32-24 Wafer 3 A1 DRY1050 100nm Abs.png
13:24, 23 September 2021 Pevo talk contribs uploaded File:Nanolab SEM lecture 2021 september.pptx (Nanolab_SEM_lecture_2021_september)
14:05, 17 March 2021 Pevo talk contribs uploaded File:6inch nitride furnace 2020-12-15.jpg
14:05, 17 March 2021 Pevo talk contribs uploaded File:6inch nitride furnace 2010-02-25.jpg
14:05, 17 March 2021 Pevo talk contribs uploaded File:4inch nitride furnace 2021-02-25.jpg
14:05, 17 March 2021 Pevo talk contribs uploaded File:4inch nitride furnace 2020-09-28.jpg
14:35, 8 February 2021 Pevo talk contribs uploaded a new version of File:Nanolab SEM lecture 2021 february jmli latest.pptx (Nanolab_SEM_lecture_2021_february)
14:33, 8 February 2021 Pevo talk contribs uploaded File:Nanolab SEM lecture 2021 february jmli latest.pptx (Nanolab_SEM_lecture_2021_February)
17:43, 29 January 2021 Pevo talk contribs uploaded File:Jipelec RTP 2.jpg
10:37, 1 December 2020 Pevo talk contribs uploaded File:Sem primer-Bob Hafner.pdf (sem_primer-Bob_Hafner)
13:03, 21 August 2020 Pevo talk contribs uploaded File:Nanolab SEM lecture 2020 August.pptx
07:23, 29 June 2020 Pevo talk contribs uploaded File:Nanolab SEM lecture 2020 June LabAdviser.pptx
13:41, 5 May 2020 Pevo talk contribs uploaded File:Nanolab SEM lecture 2020 April LabAdviser.pptx
14:53, 21 April 2020 Pevo talk contribs uploaded a new version of File:1 DTU Nanolab Thin Film TPT final April 2020.pptx
14:52, 21 April 2020 Pevo talk contribs uploaded File:1 DTU Nanolab Thin Film TPT final April 2020.pptx