Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A3 furnace break-down voltage measurement results
Breakdown voltage results for the A3 Phosphorus Drive-in furnace
Dry oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| November 2021 | DRY1050 | 118 nm |  |
 |
| February 2022 | DRY1050 | 113 nm |  |
 |
| September 2023 | DRY1050 | 113 nm |  | |
| November 2023 | DRY1100 | 490 nm |  |
 |
| February 2024 | DRY1050 | 115 nm |  |
 |
| April 2025 | DRY1050 | 114 nm |  |
 |
Wet oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| November 2021 | WET1050 | ~320 nm |  |
 |
| January 2024 | WET1050 | ~308 nm |  |
 |
The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.