Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/C1 furnace break-down voltage measurement results
Breakdown voltage results for the C1 Anneal-Oxide furnace
Dry oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| October 2023 | DRY1100 | 510 nm |  |
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The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.