LabAdviser

Photos: DTU Nanolab

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

LabAdviser is a Wiki designed for users of DTU Nanolab facilities. It contains information about available equipment and fabrication processes in the cleanroom facilities in 346/347 and the characterisation equipment in building 307/314.

LabAdviser is designed to help you identify the right equipment and provide a solid starting point for your cleanroom processes or further optimization to meet specific requirements. However, due to ongoing development of tools and processes, some information may be incomplete or not up-to-date.

Please note that LabAdviser is not a replacement for direct communication with DTU Nanolab staff. We strongly recommend reviewing the information on LabAdviser as preparation before reaching out to staff members.

If in doubt, you are always welcome to contact us via nanolabsupport@nanolab.dtu.dk.

Any feedback and/or input is welcome to the LabAdviser mailbox: labadviser@nanolab.dtu.dk

[[Image:Virtual tour in the clean room.JPG|right|300px|thumb|Take a virtual tour in the DTU Nanolab cleanroom [[1]]]]
Even if you are not a current user at our facilities, you are welcome to surf around. Please note that note that not all information might be available without login. You can take a Virtual Tour of the DTU Nanolab cleanroom facility. Please also take a look at our homepage www.nanolab.dtu.dk for more information.

You are also welcome to explore our YouTube channel with a selection of training videos.

LabAdviser contains information about

• Equipment available in- and outside of the Cleanroom Facility (building 346)
• Equipment for Characterization, primarily Electron Microscopy (building 314 and 307)
• Equipment available in the PolyFabLab and PolySupLab (building 347)
• Processes for Micro- and Nanofabrication available at DTU Nanolab
• Methods in Electron Microscopy available in building 314/307

How Labadviser works

The structure of LabAdviser allows users to begin their search either from a known material or a known process. For example, if your process involves depositing a gold layer, you would start with the Thin Film Deposition section. There, you will find two tables, overview over relevant

• Overview of relevant Materials organized in groups, such semiconductors, oxides, nitrides, metals, etc.
• Available thin film Deposition Equipment

If you know the material you want to deposit but are unsure which tool to use or how different deposition methods compare, you can select the material (e.g. gold). You will then be directed to a subpage listing all equipment capable of depositing that material and, if available, with some additional material-specific process information.

Alternatively, if you're more interested in a specific piece of equipment, or wish to explore which materials it can process, selecting that equipment will lead you to a dedicated page with detailed process information, including compatible materials.

Contents

• Introduction to LabAdviser and Micro/Nano Fabrication
• Introduction to LabManager
• Process flow template & approval (fabrication)

• Characterization in building 314/307
• Micro and Nano Fabrication Overview
• Courses (Introduction course, Tool Package Training's (TPT))
• Some DTU Nanolab Projects - Technology Research

• Surveys, statistics, monthly LabAdviser updates and other info.
• How to add information to LabAdviser

Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser

All drawings in this section done by Jesper Hanberg @DTU Nanolab

Click on [show] and see choices to the right

Front Image - - - Clean your sample Dry your sample Create a thin film on your sample Dope your sample Thermal treatment of your sample Make a mask on your sample Transfer pattern to your sample Define your structure directly File:Jehandefine.jpg Bond your samples together Characterize your sample Pack your sample Process flow examples	Photo: DTU Nanolab	Clean your sample Clean your sample Entry page in LabAdviser Techniques Materials Wafer cleaning Soap Sonic Removes dust and particles 7-up & Piranha Removes traces of organics and alkali ions RCA Two step process to remove traces of organics and metals 5% HF Removes native oxide IMEC Removing dust, traces of organics and alkali ions and slightly polish the surface. Make the surface hydrophillic Dry your sample Dry your sample Entry page in LabAdviser Techniques Materials Wafer and sample drying Spin dryers Whole wafers Critial point dryer Sensitive wafers Ethanol fume drying Sensitive wafers N2 blow drying N2 pistols Create a layer/film on your sample Create a layer/film on your sample Entry page in LabAdviser Techniques Materials Thermal Process/Oxidation Thermal oxidation Thermal SiO2 Thin film deposition Sputter deposition Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru Semiconductors: Si, Ge, ZnO Oxides: SiO2, ITO, TiO2, Al2O3, MgO, Ta2O5 Cr2O3 Transparent Conducting Oxides: ITO, AZO Alloys: TiW, NiCr, AlTi, NiV, AlCu, CoFe, CuTi, FeMn, MnIr, NiCo, NiFe, YSZ Thermal evaporation Al, Ge, Ag E-beam evaporation Metals: Ti, Cr, Al, Ni, Pt, Au, Mo, Nb, Pd, Ag, Cu, W, Ta Semiconductors: Si, Ge Oxides: SiO2, TiO2 Alloys: NiCr, TiAl LPCVD Si3N4, SRN, SiO2, Si (poly and amorph) PECVD Si3N4, SiO2, PBSG MVD FDTS Electroplating Ni Epitaxial growth /MOCVD Al, As, Ga, In, P. doping: Si, Zn Lithography/Coaters Spin coating resists, polymers Spray coating resists, polymers Dope your sample Dope your sample Entry page in LabAdviser Techniques Materials Doping Ion implant e.g. P, B, As PECVD Deposition of SiO2 or Si3N4 doped with P,B and Ge LPCVD Deposition of PolySi doped with B or P Predeposition and drive-in Doping Silicon wafers with boron Predeposition and drive-in Doping Silicon wafers with phosphorus Thermal treatment of your sample Thermal treatment of your sample Entry page in LabAdviser Techniques Materials Thermal Process Annealing (>350C) Si, PECVD layers, Al, BCB curing, Polymer Oxidation Si wafers Doping with B/P Si wafers Pyrolysis Resists: AZ, SU8, PDMS Rapid Thermal Anneal (RTP) SiO2, Si3N4, Ti, III-V Lithography/Baking Baking (<300dg) baking resist and polymers Make a mask on your sample Make a mask on your sample Entry page in LabAdviser Techniques Materials Lithography Pattern design & Mask fabrication Photolithography UV resists Deep UV lithography DUV resists E-beam lithography E-beam resists Imprinting Polymers Transfer mask pattern to your sample Transfer mask pattern to your sample Entry page in LabAdviser Techniques Materials Etch Wet etch Si, Glass, SiO2, Si3N4, Al, Cr, Ti, Au, Pt, InP, InGaAsP, GaAs/AlGaAs Dry etch Any material Lithography/Lift-off Lift-off Most materials Define your structure directly Entry page in LabAdviser Techniques Materials Direct Structure Definition Polymer Injection molding Topas, PP, PE, PS LASER micro machining Silicon, Metal, Graphene (on silicon), Glass (Pyrex, fused silica), TOPAS, PMMA Dicing saw Silicon, Glass (Pyrex, fused silica) Imprinting TOPAS, PMMA Hot Embosser Topas, PP, PE, PS, PC, PMMA, ... Lithography definition SU8, AZ resists Bond your samples together Bond your samples together Entry page in LabAdviser Techniques Bonding Eutectic bonding Fusion bonding Anodic bonding Etch/DryEtchProcessing/Bonding Temporary bonding of wafers or chips for dry etching Characterize your sample Characterize your sample Entry page in LabAdviser What do you need to measure? Technique/Method Characterization Sample Imaging, XY dimensions Microscopy: optical, SEM, AFM Sample Topography AFM, Profiling with stylus or optical Film thickness and optical constants Ellipsometry, Reflectometry, Prism Coupling Film Stress Profiling with stylus or optical Wafer thickness Micrometer gauge Element analysis XPS, EDX, SIMS Contact Angle Drop shape analyzing Resistivity Four point probe, Probe station Doping level/Carrier density ECV (Electrochemical Capacitance-Voltage) -profiler Direct Bandgap Photoluminescence Lattice mismatch X-ray diffractometer Defects/contamination Particle/defect counter Pack your sample (back-end) Pack your sample (back-end) Entry page in LabAdviser Techniques Back-end processing Chip/die mounting Wire bonding Dicing Process flow examples Entry page in LabAdviser Topic Introduction to LabAdviser and Processing Solar cell flow Process flow approval Info on process flow review UV Lithography#Resist Overview UV Lithography flows EBeamLithography#E-beam resists and Process Flows E-beam lithography flows

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Contact Information for the DTU Nanolab (Fabrication)

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab.

Subject	Email	Description
Training and Process Flow	training@nanolab.dtu.dk	All requests regarding equipment training and process flows. Please add your Name to the subject line. Note: Requests are commonly answered within 2 workdays.
E-beam training	e-beam@nanolab.dtu.dk	Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages beforehand.
E-beam Cassette loading	e-beamload@nanolab.dtu.dk	Requests regarding cassette loading on JEOL JBX-9500FSZ.
General inquiries	nanolabsupport@nanolab.dtu.dk	Inquiries related to machines, cleanroom access, Mask review, tool changes, and others. Please add your Name to the subject line. Note: Requests are commonly answered within 2 workdays.
Metal Wishes	metal@nanolab.dtu.dk	Requests for change of metal in Thin Film Deposition equipment. See current and future materials in statuslog of the respective machines. Lesker - status log E-Beam Evaporator (Temescal) - status log E-Beam Evaporator (10-pockets) - status log Sputter-System Metal-Oxide(PC1) - status log Sputter-System Metal-Nitride(PC3) - logbook
Gas-related Requests	DCH-Gas@nanolab.dtu.dk	All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
LabAdviser Mailbox	labadviser@nanolab.dtu.dk	Any questions or feedback to LabAdviser.
Commercial Inquiries	sales@nanolab.dtu.dk	For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc

DTU Nanolab Fabrication Cleanroom Layout and Phone Numbers

Cleanroom building 346 ground floor

Drawing: DTU CAS Digital

Room number Where in the room Phone number A-1 At III-V RIE 55 804 Ax2 At the Lesker 55 815 A-5 In the corner near the furnace/plasma asher 55 803 B-1 In the corridor 55 806 C-1 At the corridor 55 808 D-1 The entrance room 55 703 D-3 At the KOH 55 940 E-1 By the e-beam computers 55 943 E-5/E-4 By the MLAs in E-5, by mask aligner in E-4 55 946 E-6 Furnace 6" 55 948 F-1 III-V growth 55 949 F-2 To the right of the XRD and Ellipsometer 55 941 F-3 DUV Stepper 55 947 Basement 901 Injection molder room in the basement 55 812 Basement 904 To the right of the AFM 55 813

Basement building 346 phase 1

Drawing: DTU CAS Digital

DTU Nanolab building 314 and Phone Numbers

Drawing: DTU CAS Digital	Room number Description Phone number 314-011 QFEG 200 Cryo ESEM 56 406 314-014 Tecnai T20 56 407 314-032 Prep room 1 No phone 314-034 AFEG 250 ESEM 56 414 314-037 Titan ETEM 56 418 314-040 Prep room 2 (Bio) 56 413 314-042 Titan ATEM 56 409 314-060 Nova NanoSEM 600 56 412 314-061 Helios Nanolab 56 411