Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2

Front Image [show] - - - Clean your sample [show] Dry your sample [show] Create a thin film on your sample [show] Dope your sample [show] Thermal treatment of your sample [show] Make a mask on your sample [show] Transfer pattern to your sample [show] Define your structure directly [show] Bond your samples together [show] Characterize your sample [show] Pack your sample [show] Process flow examples [show]		Clean your sample Entry page in LabAdviser Techniques Materials Wafer cleaning Soap Sonic Removes dust and particles 7-up & Piranha Removes traces of organics and alkali ions RCA Two step process to remove traces of organics and metals 5% HF Removes native oxide IMEC Removing dust, traces of organics and alkali ions and slightly polish the surface. Make the surface hydrophillic Dry your sample Entry page in LabAdviser Techniques Materials Wafer and sample drying Spin dryers Whole wafers Critial point dryer Sensitive wafers Ethanol fume drying Sensitive wafers N2 blow drying N2 pistols Create a layer/film on your sample Entry page in LabAdviser Techniques Materials Thermal Process/Oxidation Thermal oxidation Thermal SiO2 Thin film deposition Sputter deposition Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru Semiconductors: Si, Ge, ZnO Oxides: SiO2, ITO, TiO2, Al2O3, MgO, Ta2O5 Cr2O3 Transparent Conducting Oxides: ITO, AZO Alloys: TiW, NiCr, AlTi, NiV, AlCu, CoFe, CuTi, FeMn, MnIr, NiCo, NiFe, YSZ Thermal evaporation Al, Ge, Ag E-beam evaporation Metals: Ti, Cr, Al, Ni, Pt, Au, Mo, Pd, Ag, Cu, W, Ta Semiconductors: Si, Ge Oxides: SiO2, TiO2 Alloys: NiCr, TiAl LPCVD Si3N4, SRN, SiO2, Si (poly and amorph) PECVD Si3N4, SiO2, PBSG MVD FDTS Electroplating Ni Epitaxial growth /MOCVD Al, As, Ga, In, P. doping: Si, Zn Lithography/Coaters Spin coating resists, polymers Spray coating resists, polymers Dope your sample Entry page in LabAdviser Techniques Materials Doping Ion implant e.g. P, B, As PECVD Deposition of SiO2 or Si3N4 doped with P,B and Ge LPCVD Deposition of PolySi doped with B or P Predeposition and drive-in Doping Silicon wafers with boron Predeposition and drive-in Doping Silicon wafers with phosphorus Thermal treatment of your sample Entry page in LabAdviser Techniques Materials Thermal Process Annealing (>350C) Si, PECVD layers, Al, BCB curing, Polymer Oxidation Si wafers Doping with B/P Si wafers Pyrolysis Resists: AZ, SU8, PDMS Rapid Thermal Anneal (RTP) SiO2, Si3N4, Ti, III-V Lithography/Baking Baking (<300dg) baking resist and polymers Make a mask on your sample Entry page in LabAdviser Techniques Materials Lithography Pattern design & Mask fabrication Photolithography UV resists Deep UV lithography DUV resists E-beam lithography E-beam resists Imprinting Polymers Transfer mask pattern to your sample Entry page in LabAdviser Techniques Materials Etch Wet etch Si, Glass, SiO2, Si3N4, Al, Cr, Ti, Au, Pt, InP, InGaAsP, GaAs/AlGaAs Dry etch Any material Lithography/Lift-off Lift-off Most materials Define your structure directly Entry page in LabAdviser Techniques Materials Direct Structure Definition Polymer Injection molding Topas, PP, PE, PS LASER micro machining Silicon, Metal, Graphene (on silicon), Glass (Pyrex, fused silica), TOPAS, PMMA Dicing saw Silicon, Glass (Pyrex, fused silica) Imprinting TOPAS, PMMA Lithography definition SU8, AZ resists Bond your samples together Entry page in LabAdviser Techniques Bonding Eutectic bonding Fusion bonding Anodic bonding Etch/DryEtchProcessing/Bonding Temporary bonding of wafers or chips for dry etching Characterize your sample Entry page in LabAdviser What do you need to measure? Technique/Method Characterization Sample Imaging, XY dimensions Microscopy: optical, SEM, AFM Sample Topography AFM, Profiling with stylus or optical Film thickness and optical constants Ellipsometry, Reflectometry, Prism Coupling Film Stress Profiling with stylus or optical Wafer thickness Micrometer gauge Element analysis XPS, EDX, SIMS Contact Angle Drop shape analyzing Resistivity Four point probe, Probe station Doping level/Carrier density ECV (Electrochemical Capacitance-Voltage) -profiler Direct Bandgap Photoluminescence Lattice mismatch X-ray diffractometer Defects/contamination Particle/defect counter Pack your sample (back-end) Entry page in LabAdviser Techniques Back-end processing Chip/die mounting Wire bonding Dicing Process flow examples Entry page in LabAdviser Topic Introduction to LabAdviser and Processing Solar cell flow UV Lithography#Resist Overview UV Lithography flows EBeamLithography#E-beam resists and Process Flows E-beam lithography flows