Specific Process Knowledge

2nd Level - Process Topic

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Choose the process topic you are interested in

• Back-end processing

• Characterization

• Doping

• Etch

• Imprinting

• Lithography

• Thermal Process

• Thin film deposition

• Wafer and sample drying

• Wafer Bonding

• Wafer Cleaning

• Wafer Information

• III-V Process

Overview of sample processing 2

File:Cleaning.jpg Clean the sample	File:Drying.jpg Drying Samples	File:Making a layer 1.jpg Film Formation Thermal Oxide growth Thin Film deposition Sputter deposition Thermal deposition E-beam evaporation CVD LPCVD PECVD Coating Spin coating Spray coating Electroplating Epitaxial growth	File:Thermal treatment 1.jpg Thermal treatment of the sample
Make a mask on the sample Lithography Imprinting	Transfer pattern into the sample Wet etch Dry etch Lift-off	Direct structure definition Imprinting LASER machining Lithographic definition Polymer Injection molding	Bonding samples together
Characterize the sample	Back end of the sample Chip/die mounting Wire bonding Dicing

Overview of sample processing 3

Clean your sample Clean your sample Entry page in LabAdviser Techniques Materials Wafer cleaning Soap Sonic Removes dust and particles 7-up & Piranha Removes organics and alkali ions RCA Two step process to remove organics and metals 5% HF Removes native oxide IMEC Removing dust, organics and alkali ions and slightly polish the surface. Make the surface hydrophillic	File:Dry your sample.png Dry your sample Entry page in LabAdviser Techniques Materials Wafer and sample drying Spin dryers Whole wafers Critial point dryer Sensitive wafers	File:Create a film on your sample.png Create a layer/film on your sample Entry page in LabAdviser Techniques Materials Thermal Process/Oxidation Thermal oxidation Thermal SiO2 Thin film deposition Sputter deposition Si,SiO2,Si3N3,TiO2, metals Thermal evaporation Al, ? E-beam evaporation Metals LPCVD Si3N4, SRN, SiO2, Si (poly and amorph) PECVD Si3N4, SiO2, PBSG Electroplating Ni Lithography/Coaters Spin coating resists, polymers Spray coating resists, polymers Epitaxial growth MOCVD ?	File:Dope your sample.png Dope your sample Entry page in LabAdviser Techniques Materials Thin film deposition/PECVD PECVD Deposition of SiO2 or Si3N4 doped with P,B and Ge Thin film deposition/Furnace LPCVD PolySilicon LPCVD Deposition of PolySi doped with B or P Thermal Process/Dope with Boron Predeposition and drive-in Doping Silicon wafers with boron Thermal Process/Dope with Phosphorus Predeposition and drive-in Doping Silicon wafers with phosphorus Doping Ion implant ?
File:Thermal treat your sample.png Thermal treatment of your sample Entry page in LabAdviser Techniques Materials Thermal Process Annealing Si, PECVD layers Oxidation Si wafers Doping with B/P Si wafers Pyrolysis Resists?	File:Make a mask on your sample.png Make a mask on your sample Entry page in LabAdviser Techniques Lithography Photolithography Deep UV lithography E-beam lithography Imprinting	File:Transfer mask pattrn to your sample.png Transfer mask pattern to your sample Entry page in LabAdviser Techniques Materials Etch Wet etch Si,Glass,SiO2,Si3N4,Al,Cr,Ti,Au,Pt,InP,InGaAsP,GaAs/AlGaAs Dry etch Any material Lift-off ?	File:Transfer mask pattrn to your sample.png Define your structure directly to your sample Imprinting LASER machining Lithographic definition Polymer Injection molding
File:Bond your samples together.png Bond your samples together Entry page in LabAdviser Techniques Materials	File:Characterize your sample.png Characterize your sample Entry page in LabAdviser Techniques Materials	File:Pack your sample (back-end).png Pack your sample (back-end) Chip/die mounting Wire bonding Dicing

Overview of sample processing 4

Clean your sample Clean your sample Entry page in LabAdviser Techniques Materials Wafer cleaning Soap Sonic Removes dust and particles 7-up & Piranha Removes organics and alkali ions RCA Two step process to remove organics and metals 5% HF Removes native oxide IMEC Removing dust, organics and alkali ions and slightly polish the surface. Make the surface hydrophillic	File:Dry your sample.png Dry your sample Entry page in LabAdviser Techniques Materials Wafer and sample drying Spin dryers Whole wafers Critial point dryer Sensitive wafers	File:Create a film on your sample.png Create a layer/film on your sample Entry page in LabAdviser Techniques Materials Thermal Process/Oxidation Thermal oxidation Thermal SiO2 Thin film deposition Sputter deposition Si,SiO2,Si3N3,TiO2, metals Thermal evaporation Al, ? E-beam evaporation Metals LPCVD Si3N4, SRN, SiO2, Si (poly and amorph) PECVD Si3N4, SiO2, PBSG Electroplating Ni Lithography/Coaters Spin coating resists, polymers Spray coating resists, polymers Epitaxial growth MOCVD ?	File:Dope your sample.png Dope your sample Entry page in LabAdviser Techniques Materials Thin film deposition/PECVD PECVD Deposition of SiO2 or Si3N4 doped with P,B and Ge Thin film deposition/Furnace LPCVD PolySilicon LPCVD Deposition of PolySi doped with B or P Thermal Process/Dope with Boron Predeposition and drive-in Doping Silicon wafers with boron Thermal Process/Dope with Phosphorus Predeposition and drive-in Doping Silicon wafers with phosphorus Doping Ion implant ?
File:Thermal treat your sample.png Thermal treatment of your sample Entry page in LabAdviser Techniques Materials Thermal Process Annealing Si, PECVD layers Oxidation Si wafers Doping with B/P Si wafers Pyrolysis Resists?	File:Make a mask on your sample.png Make a mask on your sample Entry page in LabAdviser Techniques Lithography Photolithography Deep UV lithography E-beam lithography Imprinting	File:Transfer mask pattrn to your sample.png Transfer mask pattern to your sample Entry page in LabAdviser Techniques Materials Etch Wet etch Si,Glass,SiO2,Si3N4,Al,Cr,Ti,Au,Pt,InP,InGaAsP,GaAs/AlGaAs Dry etch Any material Lift-off ?	File:Transfer mask pattrn to your sample.png Define your structure directly to your sample Imprinting LASER machining Lithographic definition Polymer Injection molding
File:Bond your samples together.png Bond your samples together Entry page in LabAdviser Techniques Materials	File:Characterize your sample.png Characterize your sample Entry page in LabAdviser Techniques Materials	File:Pack your sample (back-end).png Pack your sample (back-end) Chip/die mounting Wire bonding Dicing

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