Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions
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*10Å - 0.5µm (Ag) | *10Å - 0.5µm (Ag) | ||
*up to 100 nm (Cr) | *up to 100 nm (Cr) | ||
*ask if in doubt or if you wish to exceed the limits | *ask the Thin Film group if in doubt or if you wish to exceed the limits | ||
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|style="background:LightGrey; color:black"|Deposition rate | |style="background:LightGrey; color:black"|Deposition rate | ||