Specific Process Knowledge/Thin film deposition/Deposition of Gold/Resistive thermal evaporation of Au in Thermal Evaporator
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This page is written by Evgeniy Shkondin @DTU Nanolab if nothing else is stated.
All images and photos on this page belongs to DTU Nanolab.
The fabrication and characterization described below were conducted in 2023 by Evgeniy Shkondin, DTU Nanolab.
Evaporation of Au in Thermal Evaporator
This page describes the resistive thermal evaporation method of Gold in Thermal Evaporator (NANO 36 THERMAL EVAPORATOR SYSTEM).
Gold is easy to evaporated with the resistive thermal evaporation method, but it alloys with refractory metals, making thermal evaporation using a tungsten boat nearly impossible. Operators should instead use an alumina-coated boat or a box heater with an alumina crucible. With an evaporation temperature of approximately 1,400°C and a base pressure for evaporation of 10-6 Torr or lower, user can achieve deposition rate of 1-5 Å/s. In this study, we employed a standard box heater EVCH 5 with the alumina crucible (EVC5AO).
- Note! Gold pellets need to be melted properly prior the deposition - ask Nanolab technician to perform this process if you need to add more mterial. This cannot be done during the standard rise-soak pretreatment, as elevated powers requires!
Here is a photo of the inside of the thermal evaporator. On the left side, the box heater for aluminum evaporation is installed, while on the right, there is a setup for gold evaporation using the EVCH 5 box heater with an alumina thermal crucible (EVC5AO).
Photo of the Au evaporated from EVCH 5 box heater with alumina thermal crucible (EVC5AO)
Photo of the 150 mm wafer (Si/300nm_SiO2) in the dedicated holder.
Rise-soak procedure for Au in the EVCH 5 box heater with alumina thermal crucible (EVC5AO).
