Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions
| Line 45: | Line 45: | ||
*Thermal evaporation of metals | *Thermal evaporation of metals | ||
|- | |- | ||
!style="background:silver; color:black" align="left" valign="top" rowspan=" | !style="background:silver; color:black" align="left" valign="top" rowspan="5"|Performance | ||
|style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | ||
*10Å - 1µm (Al and Ag) | *10Å - 1µm (Al and Ag) | ||