Specific Process Knowledge/Lithography: Difference between revisions
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'''<big><div class="center">Pre-lithography | '''<big><div class="center">Pre-lithography</div></big>''' | ||
'''[[Specific Process Knowledge/Lithography/Resist|Resist]]''' | '''[[Specific Process Knowledge/Lithography/Resist|Resist]]''' | ||
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'''<big><div class="center">Coating | '''<big><div class="center">Coating</div></big>''' | ||
'''[[Specific Process Knowledge/Lithography/Coaters|Automatic spin coating]]''' | '''[[Specific Process Knowledge/Lithography/Coaters|Automatic spin coating]]''' | ||
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'''<big><div class="center"> | '''<big><div class="center">Exposure/design transfer</div></big>''' | ||
'''[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure Tools]]''' | '''[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure Tools]]''' | ||
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'''<big><div class="center">Development | '''<big><div class="center">Development</div></big>''' | ||
'''[[Specific Process Knowledge/Lithography/Development|Manual development]]''' | '''[[Specific Process Knowledge/Lithography/Development|Manual development]]''' | ||
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'''<big><div class="center">Post-lithography | '''<big><div class="center">Post-lithography</div></big>''' | ||
'''[[Specific Process Knowledge/Lithography/Descum|Descum]]''' | '''[[Specific Process Knowledge/Lithography/Descum|Descum]]''' | ||