Specific Process Knowledge/Lithography/Strip: Difference between revisions
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<span style="color:red">'''No metal oxides'''</span><br> | <span style="color:red">'''No metal oxides'''</span><br> | ||
*Silicon substrates | *Silicon substrates | ||
*III-V substrates | |||
*Glass substrates | *Glass substrates | ||
*Polymer substrates | *Polymer substrates | ||
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| | | | ||
*Silicon substrates | *Silicon substrates | ||
*III-V substrates (only if clean) | |||
*Glass substrates | *Glass substrates | ||
*Films, or patterned films, of any material except type IV (Pb, Te) | *Films, or patterned films, of any material except type IV (Pb, Te) | ||