Specific Process Knowledge/Lithography/Strip: Difference between revisions

@@ Line 462: / Line 462: @@
 <br clear="all" />
-Investigating the influence of the process parameters, it is clear that the gas mix and the chamber pressure has a sig nificant inpact on the ashing rate, while the gas flow has only little effect:
+'''Process parameter impact on ashing rate'''<br>
-<gallery widths=320px class="center">
+Looking at ashing rate, using linear regression models on the process parameters, indicates that the gas mix and the chamber pressure has a significant impact on the ashing rate, while the gas flow has only little effect:
-File:ParamEffect_100_mm_v1.png|Process parameter influence for 100 mm processing
+<gallery mode="packed" heights="150">
-File:ParamEffect_150_mm_v1.png|Process parameter influence for 150 mm processing
+ParamEffect_100_mm_v1.png|100 mm process parameter impact
-File:ParamEffect_200_mm_v1.png|Process parameter influence for 200 mm processing
+ParamEffect_150_mm_v1.png|150 mm process parameter impact
+ParamEffect_200_mm_v1.png|200 mm process parameter impact
 </gallery>