Specific Process Knowledge/Lithography: Difference between revisions
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DTU Nanolab offers a Tool Package Training for Lithography (TPT Lithography). You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on lithographic processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can do the online training that explains the operation for the specific lithography equipment you want to use in more detail. After completing the online training, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | DTU Nanolab offers a Tool Package Training for Lithography (TPT Lithography). You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on lithographic processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can do the online training that explains the operation for the specific lithography equipment you want to use in more detail. After completing the online training, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | ||
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The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/lithography-tool-training here]. | The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/lithography-tool-training here]. | ||
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'''Course | <BR> | ||
'''Course Layout''' | |||
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# Online lecture videos (theory) | # Online lecture videos (theory) | ||
# Quizzes for each section | # Quizzes for each section | ||
# Online training videos (equipment operation) | # Online training videos (equipment operation) | ||
# Individual hands-on training | # Individual hands-on training | ||
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''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | ''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | ||
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'''Learning objectives''' | '''Learning objectives''' | ||
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* Coating | * Coating | ||
* Exposure | * Exposure | ||
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* Resist, substrates and pre-treatment | * Resist, substrates and pre-treatment | ||
* Post-lithography steps | * Post-lithography steps | ||
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'''Qualifying Prerequisites''' | '''Qualifying Prerequisites''' | ||
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* Cleanroom safety course at DTU Nanolab | * Cleanroom safety course at DTU Nanolab | ||
* Admission to the cleanroom must be obtained before the group training session | * Admission to the cleanroom must be obtained before the group training session | ||
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'''Course Responsible''' | '''Course Responsible''' | ||
* Jens Hindborg Hemmingsen | * Jens Hindborg Hemmingsen | ||
* Thomas Aarøe Anhøj | * Thomas Aarøe Anhøj | ||
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If you have questions you can contact us via [mailto:lithography@nanolab.dtu.dk lithography@nanolab.dtu.dk]. | If you have questions you can contact us via [mailto:lithography@nanolab.dtu.dk lithography@nanolab.dtu.dk]. | ||
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=Knowledge and Information about Lithography= | =Knowledge and Information about Lithography= | ||