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Specific Process Knowledge/Lithography/Strip: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Line 254: Line 254:
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! scope=row| Total gas flow rate
! scope=row| Total gas flow rate
| 500 || 200  
| 500 sccm || 200 sccm
|-
|-
! scope=row| Gas mix ratio
! scope=row| Gas mix ratio
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