Specific Process Knowledge/Lithography/Strip: Difference between revisions
| Line 155: | Line 155: | ||
|-style="background:whitesmoke; color:black" | |-style="background:whitesmoke; color:black" | ||
!Process pressure | !Process pressure | ||
| | |1.3 mbar | ||
| | |1.3 mbar | ||
|0.5-1.5 mbar | |0.5-1.5 mbar | ||
|0.5-1.5 mbar | |0.5-1.5 mbar | ||