Specific Process Knowledge/Lithography/Strip: Difference between revisions
| Line 167: | Line 167: | ||
*N<sub>2</sub> (100 sccm) | *N<sub>2</sub> (100 sccm) | ||
| | | | ||
*O<sub>2</sub> ( | *O<sub>2</sub> (100 sccm) | ||
*N<sub>2</sub> ( | *N<sub>2</sub> (100 sccm) | ||
|O<sub>2</sub>, CF<sub>4</sub>, N<sub>2</sub> or their mixtures | |O<sub>2</sub>, CF<sub>4</sub>, N<sub>2</sub> or their mixtures | ||
|O<sub>2</sub> | |O<sub>2</sub> | ||