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Lithography index.php?title=Category:Lithography

There are four different types of lithography available at DTU Nanolab:

Comparing lithography methods at DTU Nanolab

	UV Lithography	DUV Stepper Lithography	E-beam Lithography	Nano Imprint Lithography
Generel description	Pattern transfer via ultraviolet (UV) light	Pattern transfer via deep ultraviolet (DUV) light	Patterning by electron beam	Pattern transfer via hot embossing (HE)
Pattern size range	~0.6 µm and up (resist type, thickness, and pattern dependent)	~200 nm and up (pattern type, shape and pitch dependent)	~12 nm - 1 µm (and larger at high currents)	~20 nm and up
Resist type	UV sensitive: AZ 5214E, AZ 4562, AZ MiR 701 (positive) AZ 5214E, AZ nLOF 2020, SU-8 (negative)	DUV sensitive JSR KRF M230Y, JSR KRF M35G (positive) UVN2300-0.8 (negative)	E-beam sensitive AR-P6200 CSAR, ZEP502A , PMMA (positive) HSQ, mr-EBL, AR-N 7520 (negative)	Imprint polymers: Topas PMMA mr-I 7030R
Resist thickness range	~0.5 µm to 200 µm	~50 nm to 2 µm	~30 nm to 1 µm	~ 100 nm to 2 µm
Typical exposure time	10 s - 3 min pr. wafer using mask aligners 10 min - 5 hours pr. wafer using maskless aligners	Process dependent: Pattern Pattern area Dose Throughput is up to 60 wafers/hour	Process dependent: Dose, Q [µC/cm²] Beam current, I [A] Pattern area, a [cm²] time [s] = Q*a/I	Process dependent, including heating/cooling rates
Substrate size	chips down to 3 mm x 3 mm 50 mm wafers 100 mm wafers 150 mm wafers 200 mm wafers	100 mm wafers 150 mm wafers 200 mm wafers	We have cassettes fitting: 4 small samples (slit openings: 20mm, 12mm, 8mm, 4mm) 6 wafers of 50 mm in size 3 wafers of 100 mm in size 1 wafer of 150 mm in size 1 wafer of 200 mm in size Only one cassette can be loaded at a time	small samples 50 mm wafers 100 mm wafers 150 mm wafers
Allowed materials	Any standard cleanroom material	Any standard cleanroom material	Any standard cleanroom material, except: Materials that will degas Graphene requires special treatment	Any standard cleanroom material

Equipment Pages

Resist

Pretreatment

Coating

Baking

UV Exposure Tools

Deep-UV Exposure

DUV Stepper (Canon FPA-3000EX4)

Electron Beam Exposure

Nano Imprint Lithography

Development

Descum

Lift-off

Lift-off

Strip

Lithography Tool Package Training

DTU Nanolab offers a Tool Package Training in Lithography (TPT Lithography). You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on lithographic processes and training videos for specific equipment. The theory part consists of lecture videos followed by quizzes for each section. Once that part has been completed successfully, you can begin the online training for the lithography equipment you need to use. After completing the online training, you can request hands-on training for the lithography equipment inside the cleanroom via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Description

Online lecture videos
Quizzes for each section
Equipment-related training videos
Hands-on training

Hands on training can be requested via training@nanolab.dtu.dk.

Learning objectives

Learn about the fundamentals of lithography processing in a cleanroom fabrication lab:

Coating
Exposure
Development
Resist, substrates and pre-treatment
Post-lithography steps

Knowledge and Information about Lithography

Literature

Lecture videos

Lithography TPT lecture videos:
- Current version (6 videos, 1:28 hours:minutes in total) on YouTube
- Old version (7 videos, 2:41 hours in total) on YouTube
A full lecture series from a UT Austin course on microfabrication by "litho guru" Chris Mack. Half of the lectures are on (projection) lithography :-)

Training videos

Playlists on YouTube:

Manuals
NB: Access to manuals require login

Automatic Spin Coater: Spin Coater: Gamma UV
Manual Spin Coater: Spin Coater: Labspin 02 or Spin Coater: Labspin 03
UV Mask Aligner: Aligner: MA6 - 2 or KS Aligner
Automatic Puddle Developer: Developer: TMAH UV-lithography
Manual Puddle Developer: Developer: TMAH Manual
Manual E-beam Developer: Developer: E-beam Manual

Process Flows

@@ Line 3: / Line 3: @@
 '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography click here]'''
-[[Category: Equipment|Lithography]]
+[[index.php?title=Category:Equipment|Lithography]]
-[[Category: Lithography]]
+[[index.php?title=Category:Lithography]]
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 =Lithography Tool Package Training=
-DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab.
+DTU Nanolab offers a Tool Package Training in Lithography (TPT Lithography). You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on lithographic processes and training videos for specific equipment. The theory part consists of lecture videos followed by quizzes for each section. Once that part has been completed successfully, you can begin the online training for the lithography equipment you need to use. After completing the online training, you can request hands-on training for the lithography equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].
-You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom).
+The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.
-For details, dates, and course material, please check the course description under [[LabAdviser/Courses#The_Lithography_TPT|Courses]].
+'''Course Description'''
-'''Signing up for the course'''
+# Online lecture videos
+# Quizzes for each section
+# Equipment-related training videos
+# Hands-on training
-The course is in DTU Learn. You sign up for the course by enrolling yourself in the course [https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56077 DTU Nanolab TPT: Lithography] - '''requires login'''
+''Hands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
-* Watch the lecture videos
-* Successfully complete all the quizzes
@@ Line 263: / Line 264: @@
-'''After completing the TPT'''
-When all TPT quizzes have been completed successfully, you have finished the lithography TPT, and can begin the online training on the lithography equipment you need to use. The online training is available in the course [https://learn.inside.dtu.dk/d2l/le/discovery/view/course/118192 DTU Nanolab: lithography equipment training] - '''requires login'''
-After completing the online equipment training, you become eligible for the hands-on authorization training, which will take place inside the cleanroom.
-<br clear="all" />
 =Knowledge and Information about Lithography=
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 *[[Specific_Process_Knowledge/Lithography/Resist#UV_resist_comparison_table|UV resist process flows]]
 *[[Specific_Process_Knowledge/Lithography/EBeamLithography#E-beam_resists_and_Process_flow|E-beam resist process flows]]
-*[[:Media:Process_Flow_TPT first print.pdf|Old TPT process flow (first print)]]
+*[[index.php?title=Media:Process Flow TPT first print.pdf|Old TPT process flow (first print)]]
-*[[:Media:Process_Flow_TPT alignment.pdf|Old TPT process flow (alignment)]]
+*[[index.php?title=Media:Process Flow TPT alignment.pdf|Old TPT process flow (alignment)]]
 |}
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