Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 1: | Line 1: | ||
=My first JEOL 9500 exposure tutorial= | =My first JEOL 9500 exposure tutorial= | ||
The JEOL 9500 E-beam writer offers world class performance, this however comes at a price of a fairly steep learning curve. This page is specifically intended to guide new users through their very first exposure on the system. This tutorial will demonstrate how to set up a simple dose test in an efficient manner. The complexity of this job is kept at a low level and we encourage new users to make sure their first job (first training session) matches this complexity level. More complex jobs can be run when a user is more familiar with the system. We will in particular request that users do '''not''' expect to do alignment during their first training session. | The JEOL 9500 E-beam writer offers world class performance, this however comes at a price of a fairly steep learning curve. This page is specifically intended to guide new users through their very first exposure on the system. This tutorial will demonstrate how to set up a simple dose test in an efficient manner. The complexity of this job is kept at a low level and we encourage new users to make sure their first job (first training session) matches this complexity level. More complex jobs can be run when a user is more familiar with the system. We will in particular request that users do '''not''' expect to do alignment during their first training session. | ||
A video showing the execution of the tutorial job [https://www.youtube.com/watch?v=-wZpUNAq8dA is available here.] | |||
==Tutorial job== | ==Tutorial job== | ||