Specific Process Knowledge/Lithography/Coaters: Difference between revisions

← Older edit Newer edit →

VisualWikitext

@@ Line 21: / Line 21: @@
 |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spray Coater|Spray Coater]]</b>
 |-
 !style="background:silver; width:100px; color:black;" align="center"|Purpose
 |style="background:LightGrey; color:black"|
@@ Line 62: / Line 63: @@
 *Spraying of other solutions
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Performance
 |style="background:LightGrey; color:black"|Substrate handling
@@ Line 85: / Line 87: @@
 * 4" edge handling chuck
 |style="background:WhiteSmoke; color:black"|
-* Can handle almost any sample size and shape
+Can handle almost any sample size and shape
 |-
 |style="background:LightGrey; color:black"|Permanent media
 |style="background:WhiteSmoke; color:black"|
@@ Line 104: / Line 107: @@
 * PGMEA solvent for edge bead removal, backside rinse, and spinner bowl cleaning
 |style="background:WhiteSmoke; color:black"|
-* No permanent media
+No permanent media
 |colspan="2" rowspan="2" align="center" style="background:WhiteSmoke; color:black"|Only manual dispense
 |style="background:WhiteSmoke; color:black"|
-* No permanent media
+No permanent media
+|-
-|-
 |style="background:LightGrey; color:black"|Manual dispense option
 |style="background:WhiteSmoke; color:black"|
@@ Line 124: / Line 127: @@
 * pneumatic dispense for SU-8 resist and EBR solvent
 |style="background:WhiteSmoke; color:black"|
-* Two syringe pumps
+Two syringe pumps
+|-
-|-
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range
 |style="background:LightGrey; color:black"|Spindle speed
 |style="background:WhiteSmoke; color:black"|
-*10 - 6000 rpm
+- 6000 rpm
 |style="background:WhiteSmoke; color:black"|
-*10 - 6000 rpm
+- 6000 rpm
 |style="background:WhiteSmoke; color:black"|
-*10 - 6000 rpm
+- 6000 rpm
 |style="background:WhiteSmoke; color:black"|
-*10 - 5000 rpm (3000 rpm with non-vacuum chuck)
+- 5000 rpm (3000 rpm with non-vacuum chuck)
 |colspan="2" style="background:WhiteSmoke; color:black"|
-*100 - 5000 rpm (3000 rpm with edge handling chuck)
+- 5000 rpm (3000 rpm with edge handling chuck)
 |style="background:WhiteSmoke; color:black"|
 |-
 |style="background:LightGrey; color:black"|Gyrset
 |style="background:WhiteSmoke; color:black"|
-*no
+no
 |style="background:WhiteSmoke; color:black"|
-*no
+no
 |style="background:WhiteSmoke; color:black"|
-*no
+no
 |style="background:WhiteSmoke; color:black"|
-*optional (max. speed 3000 rpm)
+optional (max. speed 3000 rpm)
 |colspan="2" style="background:WhiteSmoke; color:black"|
-*no
+no
 |style="background:WhiteSmoke; color:black"|
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
 |style="background:LightGrey; color:black"|Substrate  size
@@ Line 178: / Line 183: @@
 *small pieces down to 10x10 mm2
 |style="background:WhiteSmoke; color:black"|
-*Any sample(s) that fit inside machine
+Any sample(s) that fit inside machine
 |-
 |style="background:LightGrey; color:black"|Batch size
 |style="background:WhiteSmoke; color:black"|
-*1 - 25
+- 25
 |style="background:WhiteSmoke; color:black"|
-*1 - 25
+- 25
 |style="background:WhiteSmoke; color:black"|
-*1 - 25
+- 25
 |style="background:WhiteSmoke; color:black"|
-*1
 |colspan="2" style="background:WhiteSmoke; color:black"|
-*1
 |style="background:WhiteSmoke; color:black"|
-*1
 |-
 | style="background:LightGrey; color:black"|Allowed materials
 |style="background:WhiteSmoke; color:black"|
@@ Line 199: / Line 206: @@
 *Glass
-No resist or crystalbond allowed in the HMDS module
+'''No resist or crystalbond allowed in the HMDS module'''
 |style="background:WhiteSmoke; color:black"|
 *Silicon
@@ Line 208: / Line 215: @@
 *Glass
-No resist or crystalbond allowed in the HMDS module
+'''No resist or crystalbond allowed in the HMDS module'''
 |style="background:WhiteSmoke; color:black"|
-*All cleanroom materials except III-V materials
+All cleanroom materials except III-V materials
 |colspan="2" style="background:WhiteSmoke; color:black"|
 *Silicon