Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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== Process development== | == Process development== | ||
'''Spray coating using TI spray:'''<br> | |||
The TI spray resist is the standard spray coater resist used at DTU Nanolab. It requires no dilution and performs well. | |||
''' Spray coating using other resists:''' | |||
Other resists are allowed, but most require dilution, as the spray coater will not work with any resist viscosity higher than 20 cP. | |||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||