Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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|Remover 1165 | |Remover 1165 | ||
|AR-P 6200 series (CSAR 62), ZEP520A, mr EBL 6000, PMMA (in anisole), | |AR-P 6200 series (CSAR 62), ZEP520A, mr EBL 6000, PMMA (in anisole), | ||
UV5?, mr-T85L?, XNIL26?, mri8000?, mr-I 7010E?, mr-XNIL26_SF?, mrNIL210? | |||
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|Cyclopentanone/PGMEA | |Cyclopentanone/PGMEA | ||
|Acetone | |Acetone | ||
|SU-8 2000 series, mr-DWL, | |SU-8 2000 series, mr-DWL, LOR (1A, 3A, 5A) | ||
mr-i 8030e?, mr-NIL200?, DELO-PRE/OM4310?, OrmoStamp?, Inkron?, mr-I 8020E?, OM4310? | mr-i 8030e?, mr-NIL200?, DELO-PRE/OM4310?, OrmoStamp?, Inkron?, mr-I 8020E?, OM4310? | ||
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