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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 693: Line 693:
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!...
!AR-P 617/AR-N 7520
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|PGME/PGMEA
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|Acetone
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Line 702: Line 702:
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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!...
!Polymer Ps-b-PDMS/block copolymer
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|Heptane
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|Ethyl Acetate
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!...
!DIRTY bowlset
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|Anything Organic
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|Use the appropriate cleaning reagent for your resist
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