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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AZ 5214E, AZ MiR 701, AZ nLOF 2020
!AZ resist
|PGMEA
|PGMEA/Ethyl Lactate
|Acetone
|Acetone
|AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF 2000 series
|AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF 2000 series
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|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!CSAR, ZEP520A, mr EBL 6000
!CSAR/ZEP/mrEBL/PMMA
|Anisole
|Anisole
|Remover 1165
|Remover 1165
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|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!...
!OrmoComp/OrmoStamp
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|Propyl Acetate
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|Acetone
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!...
!BCB/CYCLOTENE
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|Mesitylene
|T1100
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|-
|-
|-style="background:LightGrey; color:black"
!Epoxy/Acrylate
|Cyclopentanone/PGMEA
|Acetone
|SU-8 2000 series, mr-DWL
|
|
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!...
!...
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|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!...
!...
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|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!...
!...
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