Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 640: | Line 640: | ||
|PGMEA | |PGMEA | ||
|Acetone | |Acetone | ||
| | |AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF 2000 series | ||
| | | | ||
|- | |- | ||
| Line 653: | Line 649: | ||
|Anisole | |Anisole | ||
|Remover 1165 | |Remover 1165 | ||
|AR-P 6200 series (CSAR 62), ZEP520A, mr EBL 6000 | |||
| | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!HSQ | |||
|MIBK | |||
|Acetone | |||
|HSQ (FOx series) | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!... | |||
| | |||
| | |||
| | | | ||
| | | | ||
|- | |- | ||