Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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Spin curves (LabSpin 6): [[media:AZ5214E_spin_curve.pdf|AZ 5214E]], [[media:Spin_curve_nLoF2020.pdf|AZ nLOF 2020]], [[media:Spin_curve_ZEP520A.pdf|ZEP 520A]], [[media:Spin_curve_Fox-15.pdf|FOX-15]], [[media:AZ_4562_spin_curve.pdf|AZ 4562]], [[Specific_Process_Knowledge/Lithography/CSAR#Spin_Curves|CSAR 6200]] | Spin curves (LabSpin 6): [[media:AZ5214E_spin_curve.pdf|AZ 5214E]], [[media:Spin_curve_nLoF2020.pdf|AZ nLOF 2020]], [[media:Spin_curve_ZEP520A.pdf|ZEP 520A]], [[media:Spin_curve_Fox-15.pdf|FOX-15]], [[media:AZ_4562_spin_curve.pdf|AZ 4562]], [[Specific_Process_Knowledge/Lithography/CSAR#Spin_Curves|CSAR 6200]] | ||
'''Available bowlsets:''' | |||
*'''AZ 5214E, AZ MiR 701, AZ nLOF 2020''' | |||
**Component solvent: PGMEA. Cleaning solvent: Acetone. | |||
* | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||