Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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''Go back to [[Specific_Process_Knowledge/Lithography/Coaters#Coater_Comparison_Table|Coater comparison table]]''. | ''Go back to [[Specific_Process_Knowledge/Lithography/Coaters#Coater_Comparison_Table|Coater comparison table]]''. | ||
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|[[Image:Labspin_2.JPG|300px]] | |||
|[[Image:Labspin_3_+_fumehood_11.JPG|300px]] | |||
|[[Image:IMG 1175.JPG|300px]] | |||
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| '''Spin Coater: Labspin 02''' || '''Spin Coater: Labspin 03 + fumehood 11''' || '''Spin Coater: Manual All Purpose''' | |||
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| Loacted in wetbench 08 in E-5 || Located in wetbench 09 in E-5|| Located in fumehood in C-1 | |||
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| LabSpin 6, Süss MicroTec || LabSpin 6, Süss MicroTec || WS-650, Laurell | |||
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| '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 LabManager]''' || '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=387 LabManager]''' || '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=315 LabManager]''' | |||
|} | |||
'''Training video: [https://www.youtube.com/watch?v=_neUkDsQhsM LabSpin02 + 03]''' | |||
===Process information=== | |||
Spin curves (LabSpin 6): [[media:AZ5214E_spin_curve.pdf|AZ 5214E]], [[media:Spin_curve_nLoF2020.pdf|AZ nLOF 2020]], [[media:Spin_curve_ZEP520A.pdf|ZEP 520A]], [[media:Spin_curve_Fox-15.pdf|FOX-15]], [[media:AZ_4562_spin_curve.pdf|AZ 4562]], [[Specific_Process_Knowledge/Lithography/CSAR#Spin_Curves|CSAR 6200]] | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||
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