Specific Process Knowledge/Lithography/Coaters: Difference between revisions
Appearance
| Line 493: | Line 493: | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
Silicon, III-V, and glass | Silicon, III-V, and glass | ||
No resist or crystalbond allowed in the HMDS module | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||