Specific Process Knowledge/Lithography: Difference between revisions
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We have cassettes that fit to | We have cassettes that fit to | ||
*4 small samples (20mm, 12mm, 8mm, 4mm) | *4 small samples (slit openings of 20mm, 12mm, 8mm, 4mm) | ||
*6 wafers of 50 mm in size | *6 wafers of 50 mm in size | ||
*3 wafers of 100 mm in size | *3 wafers of 100 mm in size | ||