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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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|style="background:LightGrey; color:black"|Spin acceleration
|style="background:LightGrey; color:black"|Spin acceleration
|style="background:WhiteSmoke; color:black" align="center"|
|style="background:WhiteSmoke; color:black" align="center"|
*10 - 3000 rpm/s <br>
*200 - 4000 rpm/s <br>


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