Specific Process Knowledge/Lithography/Coaters: Difference between revisions

@@ Line 679: / Line 679: @@
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-*Spin coating of resist in dedicated bowlsets for labspins
+*Spin coating of resist ONLY in dedicated bowlsets for '''Labspins'''
-*Spin coating of dirty substances in all purpose
+*Please do NOT use substances which is not for the dedicated bowlsets
+*Spin coating of dirty substances in '''All purpose'''
 |-
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 |style="background:LightGrey; color:black"|Substrate size
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-* 100 mm wafers
+*Chips5x5 mm and up
-* 150 mm wafers
+*50 mm wafers
+*100 mm wafers
+*150 mm wafers
 |-
 | style="background:LightGrey; color:black"|Allowed materials
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-All cleanroom materials ?
+All cleanroom materials
+'''Please ONLY use substances which is for the dedicated bowlsets in labspins'''
 |-
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