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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 508: Line 508:
*Spin coating of PGMEA based UV resists
*Spin coating of PGMEA based UV resists
*Soft baking
*Soft baking
*Edge bead removal (e-beam resists and novolac-based UV resists)  
*Edge bead removal (CSAR and novolac-based UV resists)  
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!style="background:silver; color:black;" align="center" width="60"|Resist  
!style="background:silver; color:black;" align="center" width="60"|Resist  
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