Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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*AR-P 6200.09 (CSAR) | *AR-P 6200.09 (CSAR) | ||
and | and | ||
*1 syringe, which can be used for various resists. | *1 syringe, which can be used for various resists (anisole or PGMEA-based). | ||
The 4"/6" coater station is equipped with 4 different resists lines: | The 4"/6" coater station is equipped with 4 different resists lines: | ||