Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>Spin Coating</big>''' | '''<big>Spin Coating</big>''' | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=359 | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=359 Training Video: Automatic Spin Coater]''' | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 Training Video: Manual Spin Coater]''' | ||
'''<big>UV Exposure</big>''' | '''<big>UV Exposure</big>''' | ||
*[[:File:Litho Tool Package - Exposure TARAN.pdf|Link to slides on UV exposure]] | *[[:File:Litho Tool Package - Exposure TARAN.pdf|Link to slides on UV exposure]] | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV Exposure]''' | |||
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'''<big>Electron Beam Exposure</big>''' | '''<big>Electron Beam Exposure</big>''' | ||
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'''<big>Development</big>''' | '''<big>Development</big>''' | ||
*[[ | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=329 Training Video: Automatic Puddle Developer]''' | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=324 Training Video: Manual Puddle Developer]''' | |||
'''<big>Post Processing</big>''' | '''<big>Post-Processing</big>''' | ||
*[[ | *[[:File:Litho Tool Package - PostProcessing TARAN.pdf]|Link to slides on post-processing]] | ||
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'''<big>UV Resists</big>''' | '''<big>UV Resists</big>''' | ||
*[[ | *[[:File:Litho Tool Package - Resist TARAN.pdf]|Link to slides on photoresist] | ||
'''<big> | '''<big>Inspection of Resist</big>''' | ||
*[[ | *[[:File:Litho Tool Package - Inspection v4 TARAN.pdf]|Link to slides on inspection] | ||