Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>Literature</big>''' | '''<big>Literature</big>''' | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | |||
'''<big>Spin Coating</big>''' | '''<big>Spin Coating</big>''' | ||