Specific Process Knowledge/Lithography: Difference between revisions
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===[[Specific Process Knowledge/Lithography/EBeamLithography|E-beam Lithography]]=== | ===[[Specific Process Knowledge/Lithography/EBeamLithography|E-beam Lithography]]=== | ||
*[[Specific_Process_Knowledge/Lithography/CSAR| | *[[Specific_Process_Knowledge/Lithography/CSAR|Spin curves, dose tests, and etch tests in standard positive resist AR-P 6200 (AllResist)]] | ||
*[[Specific_Process_Knowledge/Lithography/mrEBL6000| mr EBL 6000.1 negative e-beam resist (MircoResist)]] | *[[Specific_Process_Knowledge/Lithography/mrEBL6000| Spin curves and dose tests in mr EBL 6000.1 negative e-beam resist (MircoResist)]] | ||
*[[Specific_Process_Knowledge/Lithography/ZEP520A|ZEP520A (ZEON)]] | *[[Specific_Process_Knowledge/Lithography/Spin curves of ZEP520A|ZEP520A (ZEON)]] | ||
*[[Specific_Process_Knowledge/Lithography/ARP617|Copolymer AR-P 617.05 (AllResist)]] | *[[Specific_Process_Knowledge/Lithography/ARP617|Spin curves of Copolymer AR-P 617.05 (AllResist)]] | ||
*[[Specific_Process_Knowledge/Lithography/Espacer|Espacer]] | *[[Specific_Process_Knowledge/Lithography/Espacer|Process information on Espacer]] | ||
===[[Specific Process Knowledge/Lithography/NanoImprintLithography|NanoImprint Lithography]]=== | ===[[Specific Process Knowledge/Lithography/NanoImprintLithography|NanoImprint Lithography]]=== | ||