Specific Process Knowledge: Difference between revisions

@@ Line 433: / Line 433: @@
 |Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru <br>
 Semiconductors: Si, Ge, ZnO <br>
-Oxides: SiO2, ITO, TiO2, Al2O3, MgO, Ta2O3 Cr2O3<br>
+Oxides: SiO<sub>2</sub>, ITO, TiO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, MgO, Ta<sub>2</sub>O<sub>3</sub> Cr<sub>2</sub>O<sub>3</sub><br>
 Transparent Conducting Oxides: ITO, AZO<br>
 Alloys: TiW, NiCr, AlTi, NiV, AlCu, CoFe, CuTi, FeMn, MnIr, NiCo, NiFe, YSZ <br>
@@ Line 443: / Line 443: @@
 |Metals: Ti, Cr, Al, Ni, Pt, Au, Mo, Pd, Ag, Cu, W, Ta <br>
 Semiconductors: Si, Ge <br>
-Oxides: SiO2, TiO2 <br>
+Oxides: SiO<sub>2</sub>, TiO<sub>2</sub> <br>
 Alloys: NiCr, TiAl
 |-
 |LPCVD
-|Si3N4, SRN, SiO2, Si (poly and amorph)
+|Si<sub>3</sub>N<sub>4</sub>, SRN, SiO<sub>2</sub>, Si (poly and amorph)
 |-
 |PECVD
-|Si3N4, SiO2, PBSG
+|Si<sub>3</sub>N<sub>4</sub>, SiO<sub>2</sub>, PBSG
 |-
 |Electroplating