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|[[Specific Process Knowledge/Imprinting|Imprinting]]
|[[Specific Process Knowledge/Imprinting|Imprinting]]
|Imprinting
|Imprinting
|Polymers
|-
|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
|LASER machining
|
|
*TOPAS
*PMMA
|-
|-
|[[Specific Process Knowledge/Lithography|Lithography]]
|[[Specific Process Knowledge/Lithography|Lithography]]
|Lithographic definition
|Lithographic definition
|Resists
|  
*SU8
*AZ resists
|-
|-
|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
|Polymer Injection molding
|Polymer Injection molding
|Polymers
|
*TOPAS
|-
|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
|
*LASER micro machining
*Dicing saw
|
*Silicon
*Metal sheets
*Graphene (on silicon)
*Glass (Pyrex, fused silica)
*TOPAS
*PMMA
|-
|-
|}  
|}  
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