Specific Process Knowledge: Difference between revisions
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|Sample Imaging | |Sample Imaging, XY dimensions | ||
| | |Microscopy: optical,SEM,AFM | ||
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|Sample Topography | |Sample Topography | ||
| | |AFM,Profiling with stylus or optical | ||
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|Film thickness and optical constants | |Film thickness and optical constants | ||
| | |Ellipsometry,Reflectometry,Prism Coupling | ||
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|Film Stress | |Film Stress | ||
| | |Profiling with stylus or optical | ||
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|Element analysis | |Element analysis | ||
| | |XPS,EDX,SIMS | ||
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|Resistivity | |Resistivity | ||
| | |Four point probe | ||
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