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Specific Process Knowledge/Lithography: Difference between revisions

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*UV sensitive:
*UV sensitive:
**AZ5214E, AZ4562
**AZ 5214E, AZ 4562
**AZ MiR 701, AZ nLOF 2020
**AZ MiR 701, AZ nLOF 2020
**SU-8
**SU-8
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*DUV sensitive
*DUV sensitive
**KSF M230Y
**JSR KRF M230Y
**KSF M35G
**JSR KRF M35G
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*E-beam sensitive
*E-beam sensitive
**ZEP502A, CSAR, PMMA (positive)
**ZEP 502A, CSAR, PMMA (positive)
**HSQ, Ma-N 2403, AR-N 7520 (negative)
**HSQ, Ma-N 2403, AR-N 7520 (negative)
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