Specific Process Knowledge/Lithography/Strip: Difference between revisions
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! scope=row| Substrate: Materials | ! scope=row| Substrate: Materials | ||
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*<span style="color:red">'''No polymer substrates'''</span><br> | |||
*Silicon substrates | *Silicon substrates | ||
*III-V substrates | |||
*Glass substrates | *Glass substrates | ||
*Films, or patterned films, of any material except type IV (Pb, Te) | *Films, or patterned films, of any material except type IV (Pb, Te) | ||
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<span style="color:red">'''No metals'''</span><br> | *<span style="color:red">'''No metals'''</span><br> | ||
<span style="color:red">'''No metal oxides'''</span><br> | *<span style="color:red">'''No metal oxides'''</span><br> | ||
<span style="color:red">'''No III-V materials'''</span><br> | *<span style="color:red">'''No III-V materials'''</span><br> | ||
*Silicon substrates | *Silicon substrates | ||
*Glass substrates | *Glass substrates | ||
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*Films, or patterned films, of any material except type IV (Pb, Te) | *Films, or patterned films, of any material except type IV (Pb, Te) | ||
| | | | ||
<span style="color:red">'''No metals'''</span><br> | *<span style="color:red">'''No metals'''</span><br> | ||
<span style="color:red">'''No metal oxides'''</span><br> | *<span style="color:red">'''No metal oxides'''</span><br> | ||
*Silicon substrates | *Silicon substrates | ||
*III-V substrates | *III-V substrates | ||