Specific Process Knowledge/Lithography/Strip: Difference between revisions
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'''Process parameter impact on ashing rate'''<br> | '''Process parameter impact on ashing rate'''<br> | ||
Looking at ashing rate, using linear regression models on the process parameters, indicates that the gas mix and the chamber pressure has a significant impact on the ashing rate, while the gas flow has only little effect: | Looking at ashing rate, using linear regression models on the process parameters, indicates that the gas mix and the chamber pressure has a significant impact on the ashing rate, while the gas flow has only little effect: | ||
<gallery mode="packed" heights="150"> | <gallery mode="packed-hover" heights="150"> | ||
ParamEffect_100_mm_v1.png|100 mm process parameter impact | ParamEffect_100_mm_v1.png|100 mm process parameter impact | ||
ParamEffect_150_mm_v1.png|150 mm process parameter impact | ParamEffect_150_mm_v1.png|150 mm process parameter impact | ||