Specific Process Knowledge/Lithography: Difference between revisions
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''Hands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | ''Hands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | ||
'''Learning objectives''' | '''Learning objectives''' | ||
Learn about the fundamentals of lithography processing in a cleanroom | Learn about the fundamentals of lithography processing in a cleanroom: | ||
* Coating | * Coating | ||
* Exposure | * Exposure | ||
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* Resist, substrates and pre-treatment | * Resist, substrates and pre-treatment | ||
* Post-lithography steps | * Post-lithography steps | ||
'''Qualifying Prerequisites''' | |||
* Cleanroom safety course at DTU Nanolab | |||
* Admission to the cleanroom must be obtained before the group training session | |||
'''Course Responsible''' | |||
* Jens Hindborg Hemmingsen | |||
* Thomas Aarøe Anhøj <taran@dtu.dk> | |||
If you have questions you can contact us via [mailto:lithography@nanolab.dtu.dk lithography@nanolab.dtu.dk]. | |||
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=Knowledge and Information about Lithography= | =Knowledge and Information about Lithography= | ||